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Semiconductor technology

GEFA- Semiconductor technology

High Purity Ball Valves for semiconductor technology

DG5HP series ball valves - for demanding applications with the highest purity standards.
Compact design and full flow for ultra-pure media.

DG5HP - High Purity Ball Valve

Our high purity ball valves have been designed for the semiconductor technology to meet the demanding standards of the industry.

A quick overview of the key data

  • Sizes: DN 8 to DN 150
  • Pressure ratings: up to PN 125


  • Body: 1.4408
  • Ball: 1.4408
  • End caps: 1.4409 - orbital weld ends*
  • Stem: 1.4542
  • Seat: PTFE pure - reduced dead space design
  • Body seal: PFTE pure
  • Packing: PTFE pure

*This table contains only a selection of our materials, connections, cleaning, tests, etc.

Maximum purity thanks to precise polishing of the inner passages

To ensure maximum purity, the internal passages of our ball valves are precisely machined. The arithmetic mean roughness value Ra is ≤ 0.8 µm. 

Automation - flexible actuation options

Our ball valves are equipped with a standard mounting flange in accordance with EN ISO 5211, which enables direct actuator mounting without interrupting the control stem.

The flexible actuation options - whether pneumatic, electric or manual - enable customized solutions to meet individual customer requirements.

Maximum purity through careful processes

To meet the highest cleaning standards, our valves are subjected to an oil- and grease-free cleaning process. In addition, a solvent-free assembly process is used. Finally, the ends of the ball valves are sealed with caps for protection and the ball valves are individually shrink-wrapped for maximum cleanliness.

UComprehensive documentation and test certificates

As a certified company, we not only guarantee first-class valves, but also comprehensive documentation, certificates and a wide range of testing options - including acceptance test certificates in accordance with EN 10204/3.1 and pressure and leak tests in accordance with DIN EN 12266-1 P10, P11 and P12.

High adaptability of the high purity ball valves

The common pipe dimensions listed in the table can be processed flexibly in our production facilities:

Pipe [mm]
13,5 x 1,6
17,2 x 1,6
21,3 x 1,6
26,9 x 1,6
33,7 x 2,0
42,4 x 2,0
48,3 x 2,0
60,3 x 2,0
76,1 x 2,0
88,9 x 2,3

*Section of possible pipe dimensions

Maximum transparency: Insights into our audits

Discover the results of recent audits at GEFA Processtechnik GmbH from October 2023 - proof of commitment to the highest standards and transparency:

Test parameters DN 50 DN 100
Spindle packing  1,6*10-6 mbar*l/s 1,3*10-6 mbar*l/s 
Housing seal ∅  0,8*10-6 mbar*l/s 2,7*10-6 mbar*l/s 
Seat tightness  1,0*10-6 mbar*l/s 1,0*10-6 mbar*l/s 

*Leak test with 30 bar helium

Download our semiconductor technology flyer here

If you have any questions or require further information, please do not hesitate to contact us! Contact our experts for individual advice:

Anja Herms

Anja Herms

Product Manager
Ball Valves

+49 231 61009-358
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